同济大学一流材料学科建设高端论坛

上海 2019年 5月18日-20日

Scalable 2D/3D Nanofabrication & Multifunctional Micromotors

‍Xiaobin Xu

Abstract:
   Scalable nanofabrication and manipulation techniques are highly desirable in a broad range of applications including biology, electronics and optics. Several high-throughput nanofabrication strategies will be described in this talk. Such as polymer pen chemical lift-off lithography, which utilized nanoscale mechanical deformation of polymer pen and in combination with chemical lift-off lithography, it can realize sub-20 nm resolution surface chemical patterning. Anther example is multiple-patterning nanosphere lithography, which can fabricate tunable 3D hierarchical nanostructures at a resolution of 50 nm through precisely control the size of templating nanospheres multiple times. Multifunctional micromotors enabled by advanced manipulation and fabrication techniques will also be presented. These micromotors can be controlled to perform precise mechanical actions including movement and ultrahigh-speed rotation. They were further demonstrated as a prototype of nanorobots to perform different tasks such as ultrasensitive chemical sensing, single cell bioanalysis, and tunable release of molecules, and real-time monitoring.